MEMS controlled oscillator
MEMS controlled oscillator
MEMS piezoelectric longitudinal mode resonator
MEMS resonator and method of making same
MEMS resonator array structure and method of operating and...
MEMS resonator array structure and method of operating and...
MEMS resonator devices with a plurality of mass elements...
MEMS resonator devices with a plurality of mass elements...
MEMS resonator having an inner element and an outer element...
MEMS resonator having at least one resonator mode shape
MEMS resonator including main and sub movable beams, and...
MEMS resonator, a method of manufacturing thereof, and a...
MEMS resonators and method for manufacturing MEMS resonators
MEMS resonators having resonator bodies therein with...
MEMS tunable filters
MEMS ultrasonic device having a PZT and cMUT
MEMS-based quartz hybrid filters and a method of making the...
Mems-tuned high power, high efficiency, wide bandwidth power...
Metal post filter assembly using non-radiative dielectric...
Metal spray forming of waveguide for phase shifter case