MEMS ultrasonic device having a PZT and cMUT

Details MEMS ultrasonic device having a PZT and cMUT MEMS ultrasonic device having a PZT and cMUT

2011-08-23

2011-08-23

Tran, Anh Q (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S187000, C333S193000

Reexamination Certificate

active

08004373

ABSTRACT:
A MEMS ultrasonic device has an array of PZT transducer elements and a cMUT structure bonded to the array of PZT transducer elements. The MEMS ultrasonic device can be adapted for ultrasonic imaging. The cMUT structure may serve as an active MEMS acoustic filter having at least two acoustic I/O ports to alter an input acoustic signal to an output acoustic signal. The first I/O port is adapted for interfacing with a medium, and the second I/O port for passing an acoustic signal to an acoustic transducer. An array of MEMS acoustic filters may be designed to function as an acoustic lens. Fabrication methods to make the same are also disclosed.

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