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Self-aligned metal nitride for copper passivation

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Self-aligned metallurgy

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Self-aligned metallurgy

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Self-aligned method for defining a semiconductor gate oxide...

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
Reexamination Certificate

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Self-aligned method for fabricating a capacitor under...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Self-aligned method for fabricating a ridge-waveguide...

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Reexamination Certificate

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Self-aligned method for forming a narrow via

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Self-aligned method for forming dual gate thin film...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Self-aligned method of fabricating terrace gate DMOS transistor

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned method of forming a semiconductor memory array...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned methods based on low-temperature selective...

Semiconductor device manufacturing: process – Having diamond semiconductor component
Reexamination Certificate

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Self-aligned methods of fabricating silicon carbide power device

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned MOSFET gate/source/drain salicide formation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Self-aligned MOSFET with electrically active mask

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Self-aligned MRAM contact and method of fabrication

Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Reexamination Certificate

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Self-aligned multi-patterning for advanced critical...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Self-aligned multiple crown storage capacitor and method of form

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
Patent

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Self-aligned nanometer-level transistor defined without...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Self-aligned nanometer-level transistor defined without...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Self-aligned nanotube field effect transistor and method of...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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