Self-aligned contacts to gates
Self-aligned contacts to gates
Self-aligned contacts to source/drain silicon electrodes utilizi
Self-aligned copper interconnect architecture with enhanced copp
Self-aligned copper interconnect structure and method of manufac
Self-aligned copper plating/CMP process for RF lateral MOS...
Self-aligned copper silicide formation for improved...
Self-aligned cross point resistor memory array
Self-aligned cross point resistor memory array
Self-aligned damascene gate formation with low gate resistance
Self-aligned damascene gate with contact formation
Self-aligned damascene interconnect
Self-aligned deep trench DRAM array device
Self-aligned deep trench isolation to shallow trench isolation
Self-aligned dielectric cap
Self-aligned differential oxidation in trenches by ion...
Self-aligned diffused source vertical transistors with deep tren
Self-aligned diffused source vertical transistors with stack cap
Self-aligned dog-bone structure for FinFET applications and...
Self-aligned double gate mosfet with separate gates