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Reactive barrier/seed preclean process for damascene process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Reactive gaseous deposition precursor feed apparatus

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Reactive gettering in phase change solders to inhibit...

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Metallic housing or support
Reexamination Certificate

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Reactive ion etch loading measurement technique

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate

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Reactive ion etch method for forming vias through nitrogenated s

Semiconductor device manufacturing: process – Chemical etching
Patent

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Reactive ion milling/RIE assisted CMP

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Reactive plasma etch cleaning of high aspect ratio openings

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Reactive pre-clean using reducing gas during nickel silicide...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Reactive preclean prior to metallization for sub-quarter micron

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Reactive preclean prior to metallization for sub-quarter...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Reactive preclean prior to metallization for sub-quarter...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Reactor design for reduced particulate generation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Reactor design for reduced particulate generation

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate

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Reactor for processing a semiconductor wafer

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Reactor for processing a semiconductor wafer

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Reactor for processing a workpiece using sonic energy

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Reactor for processing a workpiece using sonic energy

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Reactor precoating for reduced stress and uniform CVD

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Reactor with heated and textured electrodes and surfaces

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Read-only memories and method for manufacturing the same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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