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Low defect density (Ga, Al, In)N and HVPE process for making...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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Low defect density process for deep sub-0.18 &mgr;m flash...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Low defect density, thin-layer, SOI substrates

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Low defect method for die singulation and for structural...

Semiconductor device manufacturing: process – Semiconductor substrate dicing
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Low defect pre-emitter and pre-base oxide etch for bipolar...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Low dielectric (low k) barrier films with oxygen doping by...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Low dielectric (low k) barrier films with oxygen doping by...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Low dielectric (low k) barrier films with oxygen doping by...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Low dielectric constant coating of conductive material in a dama

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Low dielectric constant dielectric films and process for making

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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Low dielectric constant dielectric films and process for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Low dielectric constant dielectric layer fabrication method...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Low dielectric constant etch stop films

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Low dielectric constant film and method thereof

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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LOW DIELECTRIC CONSTANT FILM COMPOSED OF BORON, NITROGEN,...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Low dielectric constant films derived by sol-gel processing...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Low dielectric constant insulating films with laminated...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Low dielectric constant insulation in VLSI applications

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Low dielectric constant intermetal dielectric (IMD) by formation

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Low dielectric constant material and method of processing by...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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