Alternative structure to SOI using proton beams

Ammonia gas passivation on nitride encapsulated devices

Apparatus and method for hydrogenating polysilicon thin film tra

Apparatus and method for manufacturing semiconductor...

Apparatus and method for rapid thermal processing (RTP) of a plu

Apparatus and methods for enhancing thermal performance of...

Apparatus for and method of heat-treating a wafer

Appliance and method for tempering a plurality of process...

Atmospheric pressure plasma enhanced abatement of...

Autofocus for high power laser diode based annealing system

Baking method of quartz products, computer program and...

Cleaving of substrates

Components for substrate processing apparatus and...

Conductive oxide-deposited substrate and method for...

Contact doping and annealing systems and processes for...

Controlling oxygen precipitates in silicon wafers using...

Controlling semiconductor structural warpage in rapid thermal pr

Controlling semiconductor structural warpage in rapid thermal pr

Cure process for manufacture of low dielectric constant...

Custom electrodes for molecular memory and logic devices