Solution to the problem of copper hillocks

Solutions of metal-comprising materials, and methods of...

Solutions of metal-comprising materials, methods of forming...

Solvent vapor-assisted plasticization of photoresist films...

Solving via-misalignment issues in interconnect structures...

SONOS memory device with optimized shallow trench isolation

SONOS-NAND device having a storage region separated between...

Source alternating MOCVD processes to deposit tungsten...

Spacer - defined dual damascene process method

Spacer patterns using assist layer for high density...

Specialized metal profile for via landing areas

Spin-on conductor process for integrated circuits

Spin-on-glass partial etchback planarization process

Split gate non-volatile flash memory cell having a floating...

Split poly-SiGe/poly-Si alloy gate stack

Split poly-SiGe/poly-Si alloy gate stack

Spray dispensing method for applying liquid metal

Spray method for producing semiconductor nano-particles

Spray pyrolysis for large-scale production of chalcopyrite...

Sputter deposition and annealing of copper alloy metallization