Self-aligned composite insulator with sub-half-micron multilevel
Self-aligned connection to underlayer metal lines through unland
Self-aligned contact areas for sidewall image transfer...
Self-aligned contact for closely spaced transistors
Self-aligned contact process
Self-aligned contact process for semiconductor device
Self-aligned contact process in semiconductor fabrication
Self-aligned contact process using low density/low k dielectric
Self-aligned contact process using silicon spacers
Self-aligned contact window
Self-aligned contact wiring process for SI devices
Self-aligned contacts for salicided MOS devices
Self-aligned contacts to gates
Self-aligned contacts to source/drain silicon electrodes utilizi
Self-aligned copper interconnect architecture with enhanced copp
Self-aligned copper interconnect structure and method of manufac
Self-aligned copper silicide formation for improved...
Self-aligned dual damascene arrangement for metal interconnectio
Self-aligned dual damascene etch using a polymer
Self-aligned dual thickness cobalt silicide layer formation proc