Deposition of in-situ doped semiconductor film and undoped...

Deposition of titanium amides

Deposition of titanium nitride films having improved uniformity

Deposition of transition metal carbides

Deposition of tungsten films from W(CO)6

Deposition of tungsten nitride

Deposition of various base layers for selective layer growth...

Deposition process for coating or filling re-entry shaped contac

Depth of focus (DOF) for trench-first-via-last (TFVL)...

Design layout method for metal lines of an integrated circuit

Design structure for final via designs for chip stress...

Design structures incorporating interconnect structures with...

Detection of residual liner materials after polishing in...

Detection of residual liner materials after polishing in...

Developer soluble dyed BARC for dual damascene process

Device and manufacturing method

Device and method for protecting against oxidation of a...

Device and methodology for reducing effective dielectric...

Device comprising an ohmic via contact, and method of...

Device formation method for preventing pattern shift caused...