Organic silica-based film, method of forming the same,...
Organosilane CVD precursors and their use for making...
Organosilicate polymer and insulating film therefrom
Organosilicate resins as hardmasks for organic polymer...
Orientation independent oxidation of silicon
Oxidation in an ambient comprising ozone and the reaction...
Oxidation method and oxidation system
Oxidation method and oxidation system
Oxidation method for semiconductor process
Oxidation of silicon on germanium
Oxidation of silicon using fluorine implant
Oxidation process to improve polysilicon sidewall roughness
Oxide film forming method
Oxide film forming method
Oxide superconductor thick film and method for manufacturing...
Oxide/nitride stacked gate dielectric and associated methods
Oxide/organic polymer multilayer thin films deposited by...
Oxidizing method and oxidation system
Oxidizing method and oxidizing unit for object to be processed
Oxygen plasma reduction to eliminate precursor overflow in...