HDP-CVD method for forming passivation layers with enhanced...
He treatment to improve low-k adhesion property
Heat processing method and apparatus for semiconductor process
Heat treatment apparatus, heat treatment method, and...
Heat treatment of a tantalum oxide film
Hermetic cap layers formed on low-k films by plasma enhanced...
Hermetic silicon carbide
High crack resistance nitride process
High density plasma chemical vapor deposition process
High density plasma passivation layer and method of application
High density plasma process for the formation of silicon...
High dielectric constant materials
High dielectric constant materials
High dielectric constant metal oxide gate dielectrics
High dielectric constant metal oxide gate dielectrics
High efficiency photoresist coating
High modulus filler for low k materials
High performance CMOS transistors using PMD liner stress
High performance MIS capacitor with HfO 2 dielectric
High quality silicon oxide films by remote plasma CVD from...