Silicon nitride from bis(tertiarybutylamino)silane

Silicon nitride furnace tube low temperature cycle purge for...

Silicon oxide based gate dielectric layer

Silicon oxide gap-filling process

Silicon oxide thin-films with embedded nanocrystalline silicon

Silicon oxynitride gate dielectric formation using multiple...

Silicon source reagent compositions, and method of making...

Silicon-starved nitride spacer deposition

Silicon-starved PECVD method for metal gate electrode...

Silicone polymer insulation film on semiconductor substrate...

Silicone polymer insulation film on semiconductor substrate...

Silicone polymer insulation film on semiconductor substrate...

Silicone polymer insulation film on semiconductor substrate...

Siloxan polymer film on semiconductor substrate and method...

Siloxane-based resin and a semiconductor interlayer...

Simplified method to produce nanoporous silicon-based films

Simplified process for producing nanoporous silica

Single crystal of nitride and process for preparing the same

Single-substrate-heat-processing apparatus and method for...

Single-substrate-heat-processing method for performing...