Method and system for using N.sub.2 plasma treatment to eliminat

Method and system of coating polymer solution on surface of...

Method for adjusting capacitance of an on-chip capacitor

Method for applying a photoresist layer to a substrate...

Method for applying a protecting lacquer on a wafer

Method for applying films using reduced deposition rates

Method for arraying nano material and method for fabricating...

Method for cleaning wafer surface and a method for forming thin

Method for coating ultra-thin resist films

Method for composing a thermally conductive thin film having a l

Method for controlling etch bias of carbon doped oxide films

Method for controlling photoresist baking processes

Method for curing a porous low dielectric constant...

Method for curing low dielectric constant film using direct...

Method for curing spin-on dielectric films utilizing...

Method for densification of CVD carbon-doped silicon oxide...

Method for depositing a fluorine-doped silica film

Method for depositing a low dielectric constant film

Method for depositing a nanolaminate film by atomic layer...

Method for depositing a selected thickness of an interlevel...