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Method for fabricating a semi-conductor device having a...

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method for fabricating high-performance submicron MOSFET...

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Method for fabricating semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method for forming a spacer

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method for forming a trench in a layer or a layer stack on a...

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Method for forming bottle trenches

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method for increasing utilizable surface of rugged polysilicon l

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method for making low-resistance silicide contacts between...

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method for patterning HfO2-containing dielectric

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Method for processing a layered stack in the production of a...

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method for producing a via hole to a doped region

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method for reducing capacitance depletion during hemispherical g

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method of fabricating a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method of fabricating a semiconductor insulation layer

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method of fabricating a silicon island

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method of fabricating semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method of forming integrated circuitry, and method of...

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method of forming pattern of semiconductor device

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Method of making an oxide structure having a finely calibrated t

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Method of making relaxed silicon-germanium on insulator via...

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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