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Cryopump with improved adsorption capacity

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with improved second stage array

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with improved second stage passageway

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with improved shielding

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with multiple refrigerators

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with quicker adsorption

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with rapid cooldown and increased pressure

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with selective condensation and defrost

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with two-stage pulse tube refrigerator

Refrigeration – Gas compression – heat regeneration and expansion – e.g.,...
Reexamination Certificate

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Cryopump with vibration isolation

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump with vibration isolation

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopump, and a method for the operation thereof

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopumping apparatus

Refrigeration – Low pressure cold trap process and apparatus
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Cryopumping method and apparatus

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryopumps

Refrigeration – Low pressure cold trap process and apparatus
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Cryopumps

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryorefrigerator contaminant removal

Refrigeration – Refrigeration producer – With lubricant handling means
Reexamination Certificate

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Cryosorption pump

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryosorption pump

Refrigeration – Low pressure cold trap process and apparatus
Patent

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Cryosorption surface for a cryopump

Refrigeration – Low pressure cold trap process and apparatus
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