Cryosorption surface for a cryopump

Details Cryosorption surface for a cryopump Cryosorption surface for a cryopump

1988-01-20

1988-12-20

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 417901, B01D 800

Patent

active

047917911

ABSTRACT:
A two-stage cryosorption pump has a first stage at a higher temperature and a second stage at a lower temperature. Sorption surfaces of reticulated vitreous carbon formed on the second stage have high rigidity and exceptionally high void volume.

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patent: 4546613 (1985-10-01), Eacobacci et al.
patent: 4614093 (1986-09-01), Bachler et al.
patent: 4691534 (1987-09-01), Lombardini et al.

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