Refrigeration – Low pressure cold trap process and apparatus
Patent
1977-05-16
1979-04-24
Capossela, Ronald C.
Refrigeration
Low pressure cold trap process and apparatus
62268, 55269, 55DIG15, F17C 702
Patent
active
041505492
ABSTRACT:
Cryopumping speed of nitrogen, helium, hydrogen and neon can be increased by omitting the chevron baffle in a conventional cryopump and preventing incident radiation of about 300.degree. K. from striking surfaces used to cryosorb helium, hydrogen and neon. An apparatus is disclosed utilizing three pumping surfaces created from open ended opposed nested cylinders. A radiation absorbent coating is placed on one of the surfaces to shield the helium, hydrogen and neon pumping surface. Refrigeration can be provided by a two-stage closed cycle cryogenic refrigerator.
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Turner, F. T. et al.: Small Cryopump with Integral Refrigerator, vol. 3, No. 5, Journal of Vacuum Science & Tech., N.Y. 1966, pp. 252-257.
Gareis, P. J. et al.: Cryosorption Pumping of He & H, Cryogenic Engin. News, Oct. 1967, pp. 26-30, Cleveland, Ohio.
Visser, J. et al.: A Versatile Cryopump for Industrial Vacuum Systems, Gr. Britain, Pergamon Press Ltd.
Air Products and Chemicals Inc.
Capossela Ronald C.
Moyerman Barry
Simmons James C.
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