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Method for automating manufacture of photomask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for combining via patterns into a single mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for controlling linewidth in advanced lithography...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for controlling phase angle of a mask by post-treatment

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for correcting critical dimension variations in...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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METHOD FOR CORRECTING DESIGN PATTERN OF SEMICONDUCTOR...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for correcting local loading effects in the etching...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for correcting optical proximity effects in a...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for correcting pattern critical dimension in photomask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for correction of defects in lithography masks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for crystallizing amorphous silicon into polysilicon...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for defining a region on a wall of a semiconductor struct

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for design and manufacture of a reticle using a...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for designing a reticle mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for designing alternating phase shift masks

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for designing and making photolithographic reticle,...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for designing and making photolithographic reticle,...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for designing Levenson photomask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for designing phase-shifting masks with automatization ca

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method for designing photolithographic reticle layout,...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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