Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2010-03-31
2011-11-22
Young, Christopher (Department: 1721)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
C430S030000, C430S296000, C430S942000, C716S050000, C716S053000
Reexamination Certificate
active
08062813
ABSTRACT:
In the field of semiconductor device production, a method for manufacturing a surface using two-dimensional dosage maps is disclosed. A set of charged particle beam shots for creating an image on the surface is determined by combining dosage information such as dosage maps for a plurality of shots into the dosage map for the surface. A similar method is disclosed for fracturing or mask data preparation of a reticle image.
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Fujimura Akira
Zable Harold Robert
D2S, Inc.
The Mueller Law Office, P.C.
Young Christopher
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