Vacuum ultraviolet transmitting silicon oxyfluoride...
Vacuum ultraviolet transmitting silicon oxyfluoride...
Vacuum ultraviolet trasmitting silicon oxyfluoride...
Variable step height control of lithographic patterning through
Variable transmittance phase shifter to compensate for side...
Vent for an optical pellicle system
Venting of pellicle cavity for a mask
Verification photomask
Virtually distortion-free imaging system for large field, high r
Virtually distortion-free imaging system for large field, high r
Vitreous carbon mask substrate for X-ray lithography
Vortex phase shift mask for optical lithography
Voting technique for the manufacture of defect-free printing pha
Wafer lithographic mask and wafer lithography method using...
Wafer scale encapsulation for integrated flip chip and...
Wafer's zero-layer and alignment mark print without...
Wave guided alternating phase shift mask and fabrication...
Wet etch reduction of gate widths
White defect repairing method and apparatus of photomask,...
X-ray absorber in X-ray mask and method for manufacturing the sa