Virtually distortion-free imaging system for large field, high r

Details Virtually distortion-free imaging system for large field, high r Virtually distortion-free imaging system for large field, high r

1990-10-12

1993-01-05

McCamish, Marion E.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

430394, 430396, 355 47, 355 49, 355 52, 355 66, G03B 2732, G03B 2768

Patent

active

051769700

ABSTRACT:
Virtually distortion free large field high resolution imaging is performed using an imaging system which contains large field distortion or field curvature. A reticle is imaged in one direction through the optical system to form an encoded mask. The encoded mask is then imaged back through the imaging system onto a wafer positioned at the reticle position.

REFERENCES:
patent: 4166694 (1979-09-01), Horning et al.
patent: 4198147 (1980-04-01), Alasia

Affiliated with

Also associated with

Rating

Virtually distortion-free imaging system for large field, high r does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Virtually distortion-free imaging system for large field, high r, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Virtually distortion-free imaging system for large field, high r will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2390165