Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2006-12-19
2009-08-04
Rosasco, Stephen (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
Reexamination Certificate
active
07569313
ABSTRACT:
According to an aspect of the invention, there is provided a white defect repairing method of a photomask which repairs a white defect present at an edge portion of a pattern of the photomask, the method including forming a groove or a hole having a tilted side wall which inhibits passage of exposure light at a position corresponding to that of the white defect on a translucent substrate of the photomask.
REFERENCES:
patent: 5514198 (1996-05-01), Bayle et al.
patent: 2005/0136341 (2005-06-01), Park et al.
patent: 2002-244276 (2002-08-01), None
patent: 2003-121991 (2003-04-01), None
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Kabushiki Kaisha Toshiba
Rosasco Stephen
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