White defect repairing method and apparatus of photomask,...

Details White defect repairing method and apparatus of photomask,... White defect repairing method and apparatus of photomask,...

2006-12-19

2009-08-04

Rosasco, Stephen (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

07569313

ABSTRACT:
According to an aspect of the invention, there is provided a white defect repairing method of a photomask which repairs a white defect present at an edge portion of a pattern of the photomask, the method including forming a groove or a hole having a tilted side wall which inhibits passage of exposure light at a position corresponding to that of the white defect on a translucent substrate of the photomask.

REFERENCES:
patent: 5514198 (1996-05-01), Bayle et al.
patent: 2005/0136341 (2005-06-01), Park et al.
patent: 2002-244276 (2002-08-01), None
patent: 2003-121991 (2003-04-01), None

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