Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent
1997-11-21
1999-07-27
Rosasco, S.
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
378 35, G03F 900
Patent
active
059288167
ABSTRACT:
X-ray absorber in an X-ray mask and a method for manufacturing the same which includes a first layer of crystalline phase formed on a predetermined portion of the surface of a membrane and a second layer of amorphous phase formed on the first layer.
REFERENCES:
patent: 5700605 (1997-12-01), Ito et al.
Jeon Young-Sam
Lee Don-Hee
Lee Jeong Soo
Park Chil-Keun
Song Ki Chang
LG Semicon Co. Ltd.
Rosasco S.
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