Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1995-01-17
1996-02-27
Chu, John S. V.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430165, 430192, 430193, 525480, 525501, 528155, 528156, G03F 7021, C08G 804, C08F28300
Patent
active
054947855
ABSTRACT:
A phenolic novolak composition prepared by a process comprising the steps of:
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Sarubbi Thomas R.
Sizensky Joseph J.
Toukhy Medhat A.
Chu John S. V.
OCG Microelectronic Materials Inc.
Simons William A.
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