Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate
2011-07-19
2011-07-19
Hamilton, Cynthia (Department: 1722)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
C430S271100, C430S272100, C430S313000, C430S326000, C430S449000, C438S952000, C528S153000, C528S480000
Reexamination Certificate
active
07981594
ABSTRACT:
A hardmask composition includes an organic solvent and one or more aromatic ring-containing polymers represented by Formula 1, 2 and 3:
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Cheon Hwan Sung
Kim Jong Seob
Kim Min Soo
Lee Jin Kuk
Oh Chang Il
Cheil Industries Inc.
Hamilton Cynthia
Lee & Morse P.C.
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