Antireflective coating composition

Details Antireflective coating composition Antireflective coating composition

2011-04-26

2011-04-26

Hamilton, Cynthia (Department: 1722)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

C430S311000, C430S271100

Reexamination Certificate

active

07932018

ABSTRACT:
The invention relates to an antireflective coating composition comprising a polymer, a crosslinker and a thermal acid generator, where the polymer comprises at least one unit of structure (1), at least one unit of structure (2) and at least one structure of structure (3),where R1to R9is independently selected from H and C1-C6alkyl, R′ and R″ is independently selected from H and C1-C6alkyl, X is C1-C6alkylene, Y is C1-C6alkylene. The invention further relates to a process for imaging a photoresist coated over the antireflective coating composition.

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