Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Patent
1991-11-15
2000-12-26
Chapman, Mark
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Forming nonplanar surface
430156, 4302711, 430327, 430330, 525491, 525496, G03C 500
Patent
active
061656976
ABSTRACT:
Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
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Orsula George W.
Thackeray James W.
Chapman Mark
Corless Peter F.
Frickey Darryl P.
Shipley Company L.L.C.
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