Resist composition, novel phenol compound and quinone diazide su

Resist compositions

Resist compositions

Resist compositions and patterning process

Resist compositions and patterning process

Resist compositions comprising silyl ketals and methods of...

Resist for forming patterns comprising an acid generating compou

Resist material

Resist material

Resist material and fabrication method thereof

Resist material and method for forming a resist pattern with...

Resist material and pattern formation process

Resist material comprising polymer of allylsilyl compound and pa

Resist material for use in thick film resists

Resist material with carbazole diazonium salt acid generator and

RF plasma treated photosensitive lithographic printing plates

Ring-opened polynorbornene negative photoresist with bisazide

Selected acid generating agents and their use in processes...

Selected block copolymer novolak binder resins in radiation-sens

Selected block phenolic oligomers and their use in radiation-sen