Charged-particle beam apparatus equipped with aberration...

Charged-particle beam instrument and method of correcting...

Charged-particle beam lithography apparatus and device...

Charged-particle beam system

Charged-particle beam system

Charged-particle beam system

Charged-particle-beam optical system

Charged-particle-beam projection apparatus and transfer methods

Charged-particle-beam projection-lens system exhibiting...

Chromatic aberration corrector for charged particles and...

Chromatically compensated particle-beam column

Chromatically corrected deflecting device for particle-beam equi

Circuit for image displacement in a particle beam apparatus inde

Circular, confined distribution for charged particle beams

Column simultaneously focusing a partilce beam and an...

Combined electrostatic objective and emission lens

Compaction managed mirror bend achromat

Compensated magnetic deflection coil for electron beam lithograp

Compensation of space charge in a particle beam system

Components for reducing background noise in a mass spectrometer