Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1983-08-22
1985-11-05
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250398, 250310, H01J 3726
Patent
active
045515999
ABSTRACT:
A combined objective and emission lens for a microbeam probe is described which is suitable for primary and secondary particles of the same charge sign, by which lens a bundle of primary rays of comparatively high energy can be focused on a very small spot of a plane sample surface and the secondary particles emitted by this spot can be collected into a collimated bundle of secondary rays which leaves the combined lens in a direction substantially opposite to the bundle of primary rays. In the present combined lens, the field strength between the sample surface and the lens electrode most closely adjacent to it is very high, in contrast to the known combined objective and emission lenses, so that a small emissivity of the secondary beam with a small diameter at the same time of the primary beam spot and an effective collection and collimation of the secondary particles are ensured. Certain embodiments can be changed over optionally to operation with primary and secondary particles of the same or opposite polarity.
REFERENCES:
patent: 3845305 (1974-10-01), Liebl
patent: 4255661 (1981-03-01), Liebl
"Combined Electrostatic Objective and Emission Lenses for Microcharacteriion of Surfaces", Liebl, International J. of Mass Spectrometry and Ion Physics, No. 46, 1983, pp. 511-514.
Anderson Bruce C.
Max-Planck-Gesellschaft zur Furderung der Wissenschaften e.V.
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