Circuit for image displacement in a particle beam apparatus inde

Details Circuit for image displacement in a particle beam apparatus inde Circuit for image displacement in a particle beam apparatus inde

1988-10-21

1990-01-02

Fields, Carolyn E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250310, 250396ML, 2504922, H01J 3728

Patent

active

048915238

ABSTRACT:
A circuit includes an inversely fedback operational amplifier having a saw tooth deflection signal applied at its input, as well as a coil pair and an output for deflecting the particle beam of a scanning microscope within a scanned field as established by the coil current. A plurality of resistor elements are selected by a switch and a constant current source for feeding a direct current is provided to effect the image displacement at a connection P between the coil pair and respective one of the resistor elements. Since the direct current flows only through the coils but not through the resistor elements as a consequence of the feedback amplifier, image displacement is independent of magnification established by the respective resistor element.

REFERENCES:
patent: 3757120 (1973-09-01), Muller et al.
patent: 4063091 (1977-12-01), Gee
patent: 4125772 (1978-11-01), Holmes
patent: 4439681 (1984-03-01), Norioka et al.
patent: 4607333 (1986-08-01), Yasutake et al.
Publication by Springer Series in Optical Sciences, vol. 45, pp. 36-40.

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