Chromatically compensated particle-beam column

Details Chromatically compensated particle-beam column Chromatically compensated particle-beam column

1993-08-20

1994-11-29

Dziersynski, Paul M.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, H01J 326

Patent

active

053692799

ABSTRACT:
A particle-beam column comprising a needle-type ions source such as a liquid metal ion source, one or more round lenses, and a plurality of interleaved quadrupole lenses, by means of which the chromatic aberration of the column may be reduced or entirely compensated. Also an ion-beam column comprising a liquid alloy ion source, interleaved quadrupole lenses, and a Wien velocity filter, whereby a focused beam of ions of a single atomic number may be produced. Such columns produce a more finely focused beam than columns based only on electrostatic lenses, and allow increased lens apertures and larger beam currents.

REFERENCES:
patent: 4362445 (1982-12-01), Riecke
patent: 4555666 (1985-11-01), Martin
patent: 4590379 (1986-05-01), Martin
patent: 4684808 (1987-08-01), Plies et al.
Harriott et al. "Archomatic quadrupole focusing system for use with liquid metal ion source" 1990 American Vacuum Society, pp. 1706-1710.
Kelman et al. "A quadrupole lens with negative chromatic aberration" Brief communication. pp. 271-272.

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