Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1979-07-30
1981-02-17
Dixon, Harold A.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250396ML, 250515, 335214, 336 84C, G21K 108
Patent
active
042517281
ABSTRACT:
A toroidal magnetic deflection coil for an electron beam lithography system which is compensated for deflection placement errors that normally result from eddy currents generated within the coil windings by deflection current inputs to the coil. The compensation is achieved through addition of passive conductive material along the outer periphery of the coil. The conductive material or layer is arranged close to the outer arms of the toroidal coil windings, and thereby compensates the eddy currents within the deflection coils generated by the deflection currents in the inner arms. The compensating material can be utilized to compensate for beam drag which results from the driving circuit settling time and the inductive or capacitive coupling as well, by adding more material of appropriate dimensions.
REFERENCES:
patent: 2217409 (1940-10-01), Hepp
patent: 2793311 (1957-05-01), Thomas
patent: 3792305 (1974-02-01), Lister
patent: 3911321 (1975-10-01), Wardly
patent: 3922626 (1975-11-01), Hovey
patent: 3984687 (1976-10-01), Loeffler
patent: 4023129 (1977-05-01), Kratz
Pfeiffer Hans C.
Sturans Maris A.
Dixon Harold A.
Galanthay Theodore E.
International Business Machines - Corporation
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