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Electron beam lithography system and method

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electron beam-generating apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron confinement inside magnet of ion implanter

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron energy filter

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron gun assembly

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electron gun with a field emission cathode and a magnetic lens

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron impact ion source

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electron injection in ion implanter magnets

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
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Electron lens

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron lens

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron lens

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron lens

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron lens assembly

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron lens equipment

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron lens equipped with three magnetic pole pieces

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron lens equipped with three magnetic pole pieces

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron microscope

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electron microscope

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electron microscope aperture system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Electron microscope phase enhancement

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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