Electron lens equipped with three magnetic pole pieces

Details Electron lens equipped with three magnetic pole pieces Electron lens equipped with three magnetic pole pieces

1981-07-08

1983-10-25

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

H01J 2964, G01N 2300

Patent

active

044121326

ABSTRACT:
An electron lens equipped with three magnetic pole pieces defining two gaps forms two magnetic fields. The magnetic fields are generated in said gaps by opposite and same strength excitation. S1/S2 ratio is in the range of 2.7 to 3.8, in which S1 represents the first gap length between the upper and middle magnetic pole pieces and S2 represents the second gap between the middle and lower magnetic pole pieces, so that radial (isotropic) distortion is eliminated and spiral (anisotropic) distortion is extremely reduced.

REFERENCES:
patent: 2714678 (1955-08-01), Wolff
patent: 4219732 (1980-08-01), Nakagawa et al.

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