Electron lens

Details Electron lens Electron lens

1980-04-28

1982-05-18

Dixon, Harold A.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396R, 313460, G21K 108, H01J 2946

Patent

active

043307086

ABSTRACT:
An electron lens having very low spherical aberration. The two electrodes of the lens, in the case of an immersion lens, and the outer electrodes in the case of a three electrode lens, have central openings (in the region of the optical axis) covered by a metallic thin foil or a fine mesh metallic screen curved in the general shape of a hyperbola. Equations and procedures are given for determining the exact shape of the curvature. A procedure is also disclosed for forming the metallic foil or screen section of the electrode to the desired shape.

REFERENCES:
patent: 2369782 (1945-02-01), Hillier
patent: 2408809 (1946-10-01), Pierce
patent: 2740919 (1956-04-01), Fleming

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