Electron lens equipped with three magnetic pole pieces

Details Electron lens equipped with three magnetic pole pieces Electron lens equipped with three magnetic pole pieces

1980-12-23

1983-05-17

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

G01N 2300

Patent

active

043842089

ABSTRACT:
An electron lens equipped with three magnetic pole pieces defining two gaps forms two magnetic fields. The magnetic fields are generated in said gaps by opposite and same strength excitation. The bore diameters of the middle and lower magnetic pole pieces are equal and the bore diameter of the upper magnetic pole piece is 1.5 to 5 times larger than those of the middle and lower magnetic pole pieces, so that radial (isotropic) distortion is eliminated and spiral (anisotropic) distortion is extremely reduced.

REFERENCES:
patent: 2859363 (1958-11-01), Leisegang et al.
patent: 2976457 (1961-03-01), Reisner
patent: 4219732 (1980-08-01), Nakagawa et al.

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