Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1982-07-06
1984-08-28
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
H01J 3700
Patent
active
044685637
ABSTRACT:
An electron lens equipped with a ferromagnetic body disposed in at least one of the pole gaps of the electron lens which serves as a switchable bypass for magnetic flux. The said ferromagnetic body is magnetically saturated under strong excitation, thereby permitting switching between the double-gap lens and the single-gap lens to be effected by changing the excitation current.
REFERENCES:
patent: 3351754 (1967-11-01), Dietrich et al.
patent: 3984687 (1976-10-01), Loeffler et al.
Tsuno Katsushige
Ueno Katsuyoshi
Anderson Bruce C.
Jeol Ltd.
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