Electron gun assembly

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

Reexamination Certificate

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C250S310000, C250S311000, C250S492100, C250S492200, C250S492220, C250S492300, C313S310000, C313S341000, C313S343000, C313S336000, C313S413000, C313S414000, C313S442000, C313S433000, C313S443000, C315S106000, C315S107000, C315S383000, C315S360000, C315S307000

Reexamination Certificate

active

07544951

ABSTRACT:
A device which employs an electron beam, for performing a desired function, includes an electron gun for generating the electron beam. The electron gun includes a barrel shaped rotatable structure having a plurality of annularly disposed electron sources. A curvature of a surface portion of the rotatable structure is shaped to optimize electric field concentrations. The rotatable structure further includes end portion protrusions.

REFERENCES:
patent: 5578821 (1996-11-01), Meisberger et al.
patent: 7449700 (2008-11-01), Inanami
patent: 2003/0160192 (2003-08-01), Inanami et al.
patent: 2005/0109955 (2005-05-01), Nagano et al.
Reinhold, “Pressurized 1-MeV Electron Accelerator of the Twin-Tank Design for Electron Microscopy,” IEEE (1969), pp. 119-123.
BOC Edwards,Temescal, Model STIH-270-02CK SuperSource2™, Convertible Electron Beam Turret Source.
http://www.bocedwards.com/coating—system/temescal/supersource 2—guns.cfm, Temescal® Coating Products—Components.Electron Beam Guns & Power Supply Packages-Multi-Pocket Guns; May 10, 2006.
Meisburger et al., “Requirements and Performance of an Electron-Beam Column Designed for X-Ray Mask Inspection”, J. Vac. Sci. Technol. B 9 (6), pp. 3010-3014, (1991).

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