Electron microscope

Details Electron microscope Electron microscope

2006-09-25

2008-09-02

Nguyen, Kiet T (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S398000

Reexamination Certificate

active

07420179

ABSTRACT:
An electron microscope has a spherical aberration correction system having transfer optics inserted between a spherical aberration corrector and the objective lens. The transfer optics consists of first and second lenses each of which is made of a magnetic lens. Electrons passing across a point located at distance r0from the optical axis are made to enter the first lens within the multipole element. Electrons are made to enter the second lens at distance r1of the incident point to the objective lens from the optical axis. The ratio M(=r1/r0) is greater than 1.

REFERENCES:
patent: 6555818 (2003-04-01), Hosokawa
patent: 6836373 (2004-12-01), Hosokawa
patent: 6930312 (2005-08-01), Matsuya et al.
patent: 7015481 (2006-03-01), Matsuya
patent: 2003-92078 (2003-03-01), None

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