Electron microscope aperture system

Details Electron microscope aperture system Electron microscope aperture system

1973-07-23

1976-12-07

Smith, Alfred E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

H01J 3704

Patent

active

039964680

ABSTRACT:
An electron microscope including an electron source, a condenser lens having either a circular aperture for focusing a solid cone of electrons onto a specimen or an annular aperture for focusing a hollow cone of electrons onto the specimen, and an objective lens having an annular objective aperture, for focusing electrons passing through the specimen onto an image plane. The invention also entails a method of making the annular objective aperture using electron imaging, electrolytic deposition and ion etching techniques.

REFERENCES:
patent: 2464419 (1949-03-01), Smith et al.
patent: 3100260 (1963-08-01), Wilska
patent: 3213277 (1965-10-01), Hoppe
patent: 3500043 (1970-03-01), Hanssen

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