Electron injection in ion implanter magnets

Details Electron injection in ion implanter magnets Electron injection in ion implanter magnets

2005-11-17

2008-07-22

Berman, Jack I. (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S492210, C250S491100, C250S3960ML, C250S281000, C335S210000, C335S213000

Reexamination Certificate

active

07402816

ABSTRACT:
One or more electron sources are utilized to inject electrons into an ion beam being transported between the polepieces of a magnet. In some embodiments, the electron sources are located in cavities in one or both polepieces of the magnet. In other embodiments, a radio frequency or microwave plasma flood gun is located in a cavity in at least one of the polepieces or between the polepieces.

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