Electron lens

Details Electron lens Electron lens

1974-08-26

1976-04-20

Church, Craig E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250397, H01J 3726

Patent

active

039521982

ABSTRACT:
An electron lens system comprising a plurality of quadrupole elements, a plurality of octupole elements for correcting the spherical aberrations of said plurality of quadrupole elements, and an axially symmetric lens, arranged at the inlet or outlet side of said quadrupole and octupole elements for varying the focal length of said lens system so that the excitation currents of said plurality of quadrupole elements remain fixed.

REFERENCES:
patent: 2919381 (1959-12-01), Glaser
patent: 3201631 (1965-08-01), Gale

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