Electron lens equipment

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens

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H01J 320

Patent

active

044006225

ABSTRACT:
An electron lens system wherein at least two coils are arranged in the vicinity of an electron-optical lens and are excited in directions opposite to each other, thereby making it possible to adjust the focal distance of the lens without including a rotation attributed to the electron-optical lens in an electron beam which passes through the lens.

REFERENCES:
patent: 2323328 (1943-07-01), Hillier
patent: 3560739 (1971-02-01), Wolff
patent: 3812365 (1974-05-01), LePoole

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