System and method for producing oscillating magnetic fields in w

System and method for proximity effect correction in imaging...

System and method for reducing charged particle contamination

System and method for removing particles entrained in an ion...

System and method for serial ion implanting productivity...

System and method for setecing neutral particles in an ion bean

System and method for using areas near photo global...

System and method of controlling broad beam uniformity

System and method of performing uniform dose implantation...

System and methods for wafer charge reduction for ion implantati

System and process for inspecting and repairing an original

System for controlling ion implantation dosage in electronic mat

System for improving the uniformness of patterns generated by el

System for irradiating a surface with atomic and molecular ions

System for magnetic scanning and correction of an ion beam

System for programmed drawing by particle bombardment

System for recycling gases used in a lithography tool

System to reduce heat-induced distortion of photomasks...

System, method and a program for correcting conditions for...

System, method, and apparatus for ion beam etching process...