System for magnetic scanning and correction of an ion beam

Details System for magnetic scanning and correction of an ion beam System for magnetic scanning and correction of an ion beam

2006-09-19

2009-11-10

Vanore, David A (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S492200, C250S492300, C250S3960ML

Reexamination Certificate

active

07615763

ABSTRACT:
A magnetic scanner employs constant magnetic fields to mitigate zero field effects. The scanner includes an upper pole piece and a lower pole piece that generate an oscillatory time varying magnetic field across a path of an ion beam and deflect the ion beam in a scan direction. A set of entrance magnets are positioned about an entrance of the scanner and generate a constant entrance magnetic field across the path of the ion beam. A set of exit magnets are positioned about an exit of the scanner and generate a constant exit magnetic field across the path of the ion beam.

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International Search Report, Int'l Application No. PCT/US2007/019903, Int'l Filing Date Sep. 13, 2007, 3 pgs.

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