System for programmed drawing by particle bombardment

Details System for programmed drawing by particle bombardment System for programmed drawing by particle bombardment

1977-01-25

1978-10-10

Thomas, James D.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

250398, H01J 2900

Patent

active

041198573

ABSTRACT:
A system capable of automatically producing drawings on a very small scale, comprises an electron optical system which forms a highly reduced elemental image from a diaphragm. A scanning system enables this image to be displaced line-by-line in a first direction over the recording surface and a mechanical system displacing the surface in a direction perpendicular to the first. The whole is controlled by a logic system which delivers code numbers indicating the programme to be executed for each line.

REFERENCES:
patent: 3382487 (1968-05-01), Sharon
patent: 3465295 (1969-09-01), Witt
patent: 3569951 (1971-03-01), Lavenir
patent: 3590150 (1971-06-01), McMahon
patent: 3594759 (1971-07-01), Smura
patent: 3597757 (1971-08-01), Vincent-Carrefour
patent: 3735389 (1973-05-01), Tarczy-Hornoch
patent: 3815094 (1974-06-01), Smith
patent: 4051381 (1977-09-01), Trotel

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