System and process for inspecting and repairing an original

Details System and process for inspecting and repairing an original System and process for inspecting and repairing an original

1996-07-10

1998-09-15

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

378 43, G21K 700

Patent

active

058083120

ABSTRACT:
An original inspecting and repairing system includes an inspecting device having at least one of a vacuum ultraviolet ray microscope and an X-ray microscope, for inspecting an original, and a processing device for processing the original on the basis of the inspection. This practically enables inspection and repair of any fault of a reflection type original.

REFERENCES:
patent: 4548883 (1985-10-01), Wagner
patent: 5123036 (1992-06-01), Uno et al.
patent: 5177774 (1993-01-01), Suckewer et al.

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