Apparatus comprising an electrostatic wafer cassette

Apparatus comprising an electrostatic wafer cassette

Apparatus for and method of producing ion beams

Apparatus for cleaning contaminated surfaces using energetic clu

Apparatus for controlling a charged particle beam and a lithogra

Apparatus for curing photo-curable composition

Apparatus for curing resist

Apparatus for decelerating ion beams with minimal energy...

Apparatus for demagnification or full-size ion projection lithog

Apparatus for detecting registration marks on a target such as a

Apparatus for doping a semiconductor crystalline rod

Apparatus for electron beam lithography

Apparatus for electron beam lithography

Apparatus for forming materials

Apparatus for forming, correcting pattern

Apparatus for holding an object by use of electrostatic attracti

Apparatus for image transfer with charged particle beam, and def

Apparatus for image transfer with charged particle beam, and def

Apparatus for image transfer with charged particle beam, and def

Apparatus for implanting an ion on a target and method for...